激光冲击对氧化石墨烯薄膜的结构及力电性能影响

暴杨帆; 王菡; 李志刚

doi:10.11883/bzycj-2021-0431

激光冲击对氧化石墨烯薄膜的结构及力电性能影响

doi: 10.11883/bzycj-2021-0431

暴杨帆^1,,
王菡²,
李志刚^1, ,

1.
太原理工大学机械与运载工程学院，山西太原 030024
2.
太原理工大学航空航天学院，山西太原 030024

基金项目: 山西省应用基础研究计划面上青年项目（201801D221133）

详细信息

作者简介:
暴杨帆（1994－　），男，硕士研究生，byf1843516@163.com

通讯作者:
李志刚（1975－　），男，博士，副教授，lizhigang@tyut.edu.cn

中图分类号: O389; TN244
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- 文章访问数: 259
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- PDF下载量: 29
- 被引次数: 0
出版历程
- 收稿日期: 2021-10-10
- 修回日期: 2022-01-25
- 网络出版日期: 2022-10-17
- 刊出日期: 2022-11-18

Effects of laser irradiation on the structure and mechanical-electrical properties of graphene oxide thin films

BAO Yangfan^1
,,
WANG Han²,
LI Zhigang^{1
, ,}

1.
Taiyuan University of Technology, School of Mechanical and Vehicle Engineering, Taiyuan 030024, Shanxi, China
2.
Taiyuan University of Technology, School of Aeronautics and Astronautics, Taiyuan 030024, Shanxi, China

摘要

摘要: 采用激光烧蚀氧化石墨烯薄膜，可实现其微尺度图案化加工，以应用于微纳米电子器件。但激光冲击下氧化石墨烯薄膜的结构及力、电性能变化直接影响了器件稳定性和可靠性。为研究超高应变率加载对氧化石墨烯薄膜的结构及性能的影响，采用不同功率激光冲击氧化石墨烯薄膜，通过对其表面形貌、化学成分表征揭示薄膜结构的改变机理，通过对薄膜冲击前后的硬度、弹性模量、导电率测试探索合理的激光加工参数。结果表明：在1.14 W功率的二氧化碳激光冲击下，可实现加工区氧化石墨烯薄膜的还原且不造成薄膜烧蚀断裂，其电导率可达到1.727×10³ S/m，弹性模量为49.97 GPa，硬度为5.71 GPa。
- 激光冲击 /
- 图案化加工 /
- 电导率 /
- 硬度 /
- 弹性模量
Abstract: Graphene has high specific strength and stiffness, high current-carrier mobility, low resistivity, and even exceptive electromagnetic properties, which is expected as a next-generation micro-nano photoelectric material. However, most research and applications of graphene materials and photoelectric devices are still only in the laboratory stage. On the one hand, limited to current technologies, industrial mass-scale production of high-quality monolayer graphene films is impossible. On the other hand, the micro-scale patterned machining process may bring structural and performance damage to the material, making the stability and reliability of devices difficult to guarantee. In recent years, with the innovation and progress of laser processing technology, the micro-nano-scale patterned processing of graphene oxide (GO) thin films by laser has become a key technology for solving the development of integrated circuits and information communication equipment to precision and miniaturization. The existing achievements mainly focus on the process and method of laser processing graphene materials with different structures, the physical mechanism of interaction between ultrafast laser and monolayer graphene film, etc. The deformation and damage mechanism of graphene films at ultra-high strain rates are still unclear. In particular, the industrial application of micron-scale multilayer reduced graphene oxide (RGO) films has been much widely explored. However, few studies have been conducted on their mechano-thermal and complex physical processes associated with laser shock and the resulting interlayer damage due to the weak interlayer bonding force. To study the effect of ultrahigh strain rate load on the structure and properties of GO films, GO films were prepared by pumping a certain concentration of GO solution onto the membrane. The reduced GO films were obtained by laser ablation with different laser powers. The mechanism of the film’s structural change was revealed by the characterization of its surface morphology and chemical composition. Reasonable laser machining parameters were explored by measuring the hardness, elastic modulus, and conductivity of film before and after impact. The results show that the film can be reduced without ablative fracture under CO₂ laser shock at 1.14 W power. Its electrical conductivity can reach 1.727×10³ S/m, the elastic modulus is 49.97 GPa, and hardness is 5.71 GPa.
- laser processing /
- patterned processing /
- electrical conductivity /
- hardness /
- elastic modulus

HTML全文

图 1 不同倍镜下的氧化石墨烯薄膜还原形貌

Figure 1. Reduced morphology of graphene oxide films under different magnifications

下载: 全尺寸图片幻灯片

图 2 激光烧蚀前后的元素变化

Figure 2. Elemental content changes before and after laser ablation

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图 3 不同激光功率下的电阻率及电导率

Figure 3. Resistivity and conductivity at different laser powers

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图 4 氧化石墨烯薄膜与还原氧化石墨烯的不同压入深度

Figure 4. Pressure entry depths of GO films and LSG films

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图 5 氧化石墨烯薄膜的弹性模量及硬度

Figure 5. Elastic modulus and hardness of GO films

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图 6 不同激光功率下还原氧化石墨烯薄膜的弹性模量及硬度

Figure 6. Elastic modulus and hardness of reduced graphene oxide films at different laser power

下载: 全尺寸图片幻灯片

表 1 不同压痕点的弹性模量及硬度

Table 1. Elastic modulus and hardness of different indentation points

GO压痕点弹性模量/GPa 硬度/GPa

1 13.42 0.63
2 13.14 0.62
3 13.43 0.60
4 13.58 0.61
平均值 13.39 0.62

下载: 导出CSV

表 2 不同激光功率下还原氧化石墨烯薄膜的弹性模量及硬度

Table 2. Elastic modulus and hardness of reduced graphene oxide films at different laser power

激光还原功率/W 弹性模量/GPa 硬度/GPa

1.11 48.53 5.27
1.14 49.97 5.71
1.17 48.95 5.38

下载: 导出CSV

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