Effectsofpackagematerialsonperformances

ofapiezoresistiveMEMSacceleromete

LIPing; GAO Shi-qiao; JINLei; SHI Yun-bo

doi:10.11883/1001-1455(2012)06-0623-06

Volume 32 Issue 6

Apr. 2014

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LIPing, GAO Shi-qiao, JINLei, SHI Yun-bo. EffectsofpackagematerialsonperformancesofapiezoresistiveMEMSacceleromete[J]. Explosion And Shock Waves, 2012, 32(6): 623-628. doi: 10.11883/1001-1455(2012)06-0623-06

Citation:

LIPing, GAO Shi-qiao, JINLei, SHI Yun-bo. Effectsofpackagematerialsonperformances ofapiezoresistiveMEMSacceleromete[J]. Explosion And Shock Waves, 2012, 32(6): 623-628. doi: 10.11883/1001-1455(2012)06-0623-06

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Effectsofpackagematerialsonperformances ofapiezoresistiveMEMSacceleromete

doi: 10.11883/1001-1455(2012)06-0623-06

1.
StateKeyLaboratoryofExplosionScienceandTechnology,
2.
BeijingInstituteofTechnology,Beijing 100081,China;

Publish Date: 2012-11-25

Abstract

Abstract

Aseriesofexperimentswerecarriedouttoexploretheeffectsofpackagematerialsonthe performancesofapiezoresistive MEMSaccelerometerunderhigh-gimpact.Fortheaccelerometers packagedwithceramicandstainlesssteel,respectively,theresidualstressandthepiezoresistancevariationweremeasuredbyusingaRamanspectrometerbeforeandafterpackage. Theirsensitivityand anti-overloadcapabilityweretestedbyapplyingaMachethammerandaHopkinsonbar,respectively. Andthetestprecisiondifferencesbetweenthetwoaccelerometerswereanalyzedinthefieldexperiment. Theexperimentalresultsshowthattheresidualstressincrementsoftheaccelerometerswith stainlesssteelpackagearehigherthanthoseoftheaccelerometerswithceramicpackageandthepiezoresistancevariationscausedbytheresidual tressesarehigher.Buttheaccelerometerswithstainlesssteelpackagehavehighersensitivitiesandbetteranti- overloadcapabilitiescomparedwiththeaccelerometerswithceramicpackage.

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