Effects of medium and static pressure on dynamic characteristics of piezoresistive absolute pressure sensor calibrated by shock tube

LI Bo; HUANG Nan; YANG Jun; QIN Haifeng; YIN Xiao; ZHANG Zhaojing

doi:10.11883/bzycj-2019-0309

Volume 40 Issue 5

May 2020

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LI Bo, HUANG Nan, YANG Jun, QIN Haifeng, YIN Xiao, ZHANG Zhaojing. Effects of medium and static pressure on dynamic characteristics of piezoresistive absolute pressure sensor calibrated by shock tube[J]. Explosion And Shock Waves, 2020, 40(5): 054101. doi: 10.11883/bzycj-2019-0309

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Effects of medium and static pressure on dynamic characteristics of piezoresistive absolute pressure sensor calibrated by shock tube

doi: 10.11883/bzycj-2019-0309

1.
Changcheng Institute of Metrology & Measurement, Beijing 100095, China
2.
China North Vehicle Research Institute, Beijing 100072, China
3.
Beijing Institute of Precise Mechatronics and controls, Beijing 100076, China

Received Date: 2019-08-11
Rev Recd Date: 2019-11-04
Publish Date: 2020-05-01

Abstract

Abstract

Shock tube was usually used to calibrate the dynamic pressure sensor. During the calibration process of shock tube, the dynamic performance indexes of piezoresistive absolute pressure sensor, such as resonance frequency, depend on both the static pressure environment and gas medium of shock tube, affecting the calibration of dynamic characteristics of the sensor. Based on the working principle of piezoresistive pressure sensor, the mechanism of the sensing diaphragm structure was analyzed and a dynamic model was established. The numerical simulations using ANSYS and SIMULINK softwares have been performed and the simulation results are consistent with the theoretical predications. The results indicated that there was a non-linear relationship between the resonant frequency and the static pressure of the sensor, and it increased significantly with the increase of the diameter-thickness ratio of the sensing diaphragm. The damping ratio coefficient was related to the gas medium and increased with the decrease of gas density. The sensitivity of the sensor was related to neither the gas medium nor the static pressure. The effects of medium and static pressure parameters on the calibration of piezoresistive absolute pressure sensor should be considered.
- shock tube,
- step pressure,
- dynamic characteristics,
- piezoresistive sensor,
- absolute pressure sensor,
- dynamic calibration

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References(14)

References

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